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Submicron Fabrication

Wolf, E. D. (1979) Submicron Fabrication. In: Proceedings of the Caltech Conference On Very Large Scale Integration. California Institute of Technology , Pasadena, CA, p. 30. http://resolver.caltech.edu/CaltechCONF:20120504-151745242

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Abstract

Submicron fabrication is the broad interdisciplinary activity that produces microstructures with feature sizes less than one micrometer. Much has been published on the fabrication of custom integrated circuits using advance lithography and pattern transfer techniques. This talk reviewed some of the limit at ions and advantages of submicron fabrication. Also a brief summary of the objectives, equipment status and accomplishments of the new National Submicron Facility at Cornell University were discussed.


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Computer Science Technical Report3340
Record Number:CaltechCONF:20120504-151745242
Persistent URL:http://resolver.caltech.edu/CaltechCONF:20120504-151745242
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Usage Policy:No commercial reproduction, distribution, display or performance rights in this work are provided.
ID Code:185
Collection:CaltechCONF
Deposited By: Kristin Buxton
Deposited On:08 Aug 2012 20:28
Last Modified:26 Dec 2012 07:10

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