Wolf, E. D. (1979) Submicron Fabrication. In: Proceedings of the Caltech Conference On Very Large Scale Integration. California Institute of Technology , Pasadena, CA, p. 30. https://resolver.caltech.edu/CaltechCONF:20120504-151745242
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Abstract
Submicron fabrication is the broad interdisciplinary activity that produces microstructures with feature sizes less than one micrometer. Much has been published on the fabrication of custom integrated circuits using advance lithography and pattern transfer techniques. This talk reviewed some of the limit at ions and advantages of submicron fabrication. Also a brief summary of the objectives, equipment status and accomplishments of the new National Submicron Facility at Cornell University were discussed.
| Item Type: | Book Section | ||||||
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| Record Number: | CaltechCONF:20120504-151745242 | ||||||
| Persistent URL: | https://resolver.caltech.edu/CaltechCONF:20120504-151745242 | ||||||
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| Usage Policy: | No commercial reproduction, distribution, display or performance rights in this work are provided. | ||||||
| ID Code: | 185 | ||||||
| Collection: | CaltechCONF | ||||||
| Deposited By: | Kristin Buxton | ||||||
| Deposited On: | 08 Aug 2012 20:28 | ||||||
| Last Modified: | 03 Oct 2019 22:50 |
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