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Jump to: H Number of items: 1. HHuber, Robert J. (1979) A Simple Two-Layer Aluminum Metal Process for VLSI. In: Proceedings of the Caltech Conference On Very Large Scale Integration. California Institute of Technology , Pasadena, CA, pp. 113-123. https://resolver.caltech.edu/CaltechCONF:20120507-115757571 |